METHOD OF AMORPHOUS OXIDE OF ALUMINUM COATING BY REACTIVE EVAPORATION OF ALUMINUM IN LOW PRESSURE DISCHARGE Russian patent published in 2018 - IPC C23C14/08 C23C14/24 

FIELD: manufacturing technology.

SUBSTANCE: invention relates to the field of coating of amorphous aluminum oxide on metal products and dielectrics and can be used in various fields of science and technology. Method for coating an amorphous alumina with reactive evaporation of aluminum is carried out as follows. In the working chamber, a voltage is applied and a glow discharge is ignited between the self-priming hollow cathode, through the cavity of which the flow of argon is fed, and a hollow anode placed inside the screen having a floating potential. An aluminum hinge is placed in the anode cavity and is used as a crucible, the self-in-heated hollow cathode is heated up by increasing the discharge current to a temperature, providing a transition of a glow discharge into a combustion regime with a double electric charge layer at the entrance to the hollow anode, and cleaning the surface of the substrate, installed opposite the aperture of the hollow anode, by spraying with argon ions. Then oxygen is supplied to the working chamber and the discharge current is increased to values, providing heating and evaporation of aluminum with ionization of its vapors by a stream of electrons accelerated in a double electron layer and the formation of a flux of ions of evaporated aluminum, accelerated to an energy of 10–100 electron-volts in the direction of the substrate, with the formation of amorphous aluminum oxide coatings in a medium containing oxygen and aluminum vapor.

EFFECT: provides a high-quality dielectric oxide coating of amorphous alumina at an adjustable over a wide range of application rates.

1 cl, 1 dwg