METHOD FOR DIELECTRIC SPECTROSCOPY OF THIN LAYER ON SOLID SURFACE IN INFRARED RANGE Russian patent published in 2011 - IPC G01R27/26 G01J3/42 G01N21/35 

FIELD: physics.

SUBSTANCE: dielectric spectroscopy method involves exposing a layer to probe radiation, for which material of the body has known permittivity with a negative real part, converting radiation to a surface electromagnetic wave (SEW), measuring intensity of the SEW field after traversing different microscopic distances, determining the complex refractive index of the SEW from measurement results and known layer thickness, calculating permittivity of the material of the layer by solving SEW dispersion equations for the waveguide structure containing the surface and the layer. The selected radiation has a continuous or discrete spectrum and said radiation is converted to a set of SEW, frequency values of which are equal to radiation component frequencies.

EFFECT: invention widens the frequency band and cuts measurement time.

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