FIELD: metallurgy.
SUBSTANCE: invention can be implemented particularly in installations for production of dislocation-free crystals of silicon of various diametre and length by methods of crucible-free zone melting (CFZM), Chokchalsky and other methods. The fastening unit of a heated body on rod 1 in the pressure tight chamber includes holder 2 of the heated body and heat transferring bush 3 for axisymmetrical attachment of holder 2 on rod 1. Additionally, it has at least three disks successively secured on an upper end of bush 3 parallel to each other and perpendicular to axis of the bush. Odd disks 5, 7 of them have arc-shape cuts arranged along one circumference, while even disk 6 has radial cuts in form of oval or rectangular sectors forming lamels, number of which twice exceeds number of cuts on the odd disks. Also, the disks are mutually positioned so, that two lamels of the even disk are opposite to each cut of the odd disk. Additionally the disks are interconnected in pairs with at least three bridges distributed uniformly along circumference. Also, the bridges between successive pairs of the disks are set off relative to each other in angular direction. The lamels of the even disk have conic shape.
EFFECT: maximal reduction of heat loads on rod by decrease of heat removal in axial direction due to increased heat resistance between heated body and rod and radiation of bigger amount of heat into environment off surface of heat transmitting elements, which increases service life of trouble-free operation of installations with pressure tight process chambers owing to increased reliability of operation of packing at input of rod motion.
2 cl, 4 dwg
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Authors
Dates
2011-11-20—Published
2009-12-28—Filed