METHOD OF TREATING LIQUID Russian patent published in 2012 - IPC G03F7/42 H01L21/00 

FIELD: chemistry.

SUBSTANCE: method of treating a liquid involves decomposition of a resin in the liquid by bringing ozone gas into contact with the liquid which contains a water-soluble carbonyl compound and resin. The method of treating a liquid also involves removal of organic acid formed during resin decomposition from the liquid by subjecting the liquid to ion exchange on an ion-exchange resin after decomposition. The ion-exchange resin contains anion-exchange resin. The liquid undergoing ion exchange contains water. The water-soluble carbonyl compound is at least one compound selected from y-butyrolactone, ethylene carbonate, ethylene acetate and glycerol acetate. Also, the liquid used for contact with ozone gas during decomposition is obtained by using a liquid containing a water-soluble carbonyl compound and water as a solvent, and removing the resin from the substrate containing resin.

EFFECT: reusing exfoliating liquid to remove resin components, using an exfoliating liquid which does not cause metal corrosion on the substrate.

11 cl, 3 dwg