METHOD OF FORMING ORDERED ARRAY OF NANOSIZED SPHEROIDS ON SUBSTRATE Russian patent published in 2012 - IPC H01L21/268 B82B3/00 

FIELD: physics.

SUBSTANCE: method of forming an ordered array of nanosized spheroids on a substrate involves transfer of a film substance deposited on the surface of a transparent donor plate onto an acceptor substrate via pulsed laser exposure of the film through the plate, wherein a sacrificial interlayer which evaporates upon exposure, is deposited between said film and plate.

EFFECT: high resolution of forming a pattern, possibility of making microstructures with minimum dimensions, much smaller than the wavelength of radiation which initiates the technological process.

5 cl, 3 dwg