FORMING OF MICROSTRUCTURE ON SURFACE BY PLASTIC STRAIN Russian patent published in 2015 - IPC H01L21/263 

Abstract RU 2546720 C1

FIELD: physics.

SUBSTANCE: in compliance with this process, auxiliary substance ply is made on the substrate to abut thereon. Substrate surface if subjected to laser pulse heating to cause chemical decomposition or evaporation of said auxiliary substance ply.

EFFECT: simple, one-step process, possibility to make hollow 3D and sealed micro-channel structure for transfer of liquids and gases on substrate.

9 cl, 5 dwg

Similar patents RU2546720C1

Title Year Author Number
METHOD OF FORMING ORDERED ARRAY OF NANOSIZED SPHEROIDS ON SUBSTRATE 2010
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
RU2444084C1
LASER FORMING MECHANICAL MICROSTRUCTURES ON SUBSTRATE SURFACE 2010
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
  • Mikhajlova Dar'Ja Sergeevna
RU2452792C2
METHOD OF SUBLIMATION AND LASER PROFILING OR DRILLING OF TRANSLUCENT SUBSTRATES 2014
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
RU2556177C1
PASSIVE OPTICAL SHUTTER 2013
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
  • Shergin Sergej Leonidovich
  • Shlishevskij Viktor Brunovich
RU2521206C1
PROCESS OF DIRECT APPLICATION OF FILM PATTERN 1993
  • Chesnokov V.V.
RU2103847C1
METHOD OF CORRECTING SHAPE OF SURFACE OF OPTICAL COMPONENTS 2012
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
  • Kochkarev Denis Vjacheslavovich
RU2499286C2
METHOD OF PRODUCING TERAHERTZ DETECTORS 2014
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
  • Kochkarev Denis Vjacheslavovich
  • Kuznetsov Maksim Viktorovich
RU2545497C1
METHOD AND DEVICE FOR CLEANING SUBSTRATE AND COMPUTER SOFTWARE PRODUCT 2019
  • Dietze, Uwe
  • Hichri, Habib
  • Lee, Seongkuk
  • Dattilo, Davide
  • Samayoa, Martin
RU2764237C1
METHOD OF OBTAINING RELIEF ON SURFACE 2013
  • Chesnokov Vladimir Vladimirovich
  • Chesnokov Dmitrij Vladimirovich
  • Kochkarev Denis Vjacheslavovich
  • Kuznetsov Maksim Viktorovich
  • Rajkhert Valerij Andreevich
RU2546719C1
THIN NANOCRYSTALLINE INTER-METALLIC FILM ON GLASS SUBSTRATE PRODUCTION METHOD 2017
  • Makrushina Anna Nikolaevna
  • Plotnikov Vladimir Aleksandrovich
  • Makarov Sergej Viktorovich
RU2680072C1

RU 2 546 720 C1

Authors

Chesnokov Dmitrij Vladimirovich

Dates

2015-04-10Published

2013-12-06Filed