METHOD OF PRODUCING TERAHERTZ DETECTORS Russian patent published in 2015 - IPC H01L21/268 

FIELD: physics.

SUBSTANCE: method of producing terahertz electromagnetic wave detectors with surface-barrier diodes includes forming, on the surface of a semiconductor plates, an insulator layer with openings, laser-pyrolytic deposition of anode metal and forming an antenna; the insulator layer is sputtered in a vacuum on the semiconductor plate with preliminary deposition on the surface thereof of a layer of nanospheres which are not in contact with each other, after which openings are obtained by removing the nanospheres, and then forming an anode electrode with addressed laser-pyrolytic deposition of a metal in an atmosphere containing vapour of a volatile chemical compound of the metal on an area of the insulator with overlapping of the edges of the opening, while continuing deposition until an antenna is formed.

EFFECT: increasing resolution of laser-pyrolytic deposition of the anode electrode of a surface-barrier diode.

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