FIELD: physics.
SUBSTANCE: first, masks of absorbing material are applied on substrate surface at the points of recesses or holed thereon. Then, substrate is irradiated with the train of laser nano- and subnanosecond-long pulses, pulse length being smaller than the time of substrate heating wavelength by half the spacing between adjacent masks. Temperature at locations of said masks is brought to the substrate material sublimation level.
EFFECT: laser micro processing and profiling or drilling of plates and diamonds and other translucent dielectrics.
4 cl, 1 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD OF OBTAINING RELIEF ON SURFACE | 2013 |
|
RU2546719C1 |
FORMING OF MICROSTRUCTURE ON SURFACE BY PLASTIC STRAIN | 2013 |
|
RU2546720C1 |
OPTICAL PASSIVE LIMITER OF PASSING RADIATION | 2013 |
|
RU2555503C1 |
METHOD AND APPARATUS FOR ATOMIC EMISSION SPECTRAL ANALYSIS OF NANO-OBJECTS | 2014 |
|
RU2573717C2 |
SEMICONDUCTOR LED DEVICE | 2013 |
|
RU2545492C1 |
LASER FORMING MECHANICAL MICROSTRUCTURES ON SUBSTRATE SURFACE | 2010 |
|
RU2452792C2 |
METHOD OF ORDERING THE LOCATION OF NANOPARTICLES ON THE SUBSTRATE SURFACE | 2016 |
|
RU2646441C1 |
METHOD OF FORMING ORDERED ARRAY OF NANOSIZED SPHEROIDS ON SUBSTRATE | 2010 |
|
RU2444084C1 |
PASSIVE OPTICAL SHUTTER | 2013 |
|
RU2521206C1 |
METHOD OF CORRECTING SHAPE OF SURFACE OF OPTICAL COMPONENTS | 2012 |
|
RU2499286C2 |
Authors
Dates
2015-07-10—Published
2014-01-09—Filed