METHOD FOR MANUFACTURING OF ELECTRON EMITTERS AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2012 - IPC H01J19/02 C23C16/08 C23C16/48 

FIELD: electricity.

SUBSTANCE: method for electron emitters manufacturing of wolfram with alloy additives consists of the following: mixture of wolfram hexafluoride, hydrogen and volatile fluoride or iodide of alloy additive is added to vacuum chamber in ratio corresponding to preset composition of emitter; the mixture is exposed to laser beam action and reaction products are evacuated from the chamber at that emitter is formed by deposition of reduced wolfram and alloy additive to substrate made of wolfram and located in the laser beam centre at the holder while moving the substrate in regard to laser with speed equal to the rate of wolfram and alloy additive deposition.

EFFECT: increase of electron emitters operation life due to homogenous distribution of alloy additives with lower electronic work function than the same value for wolfram; reduction of emitter erosion due to elimination of oxidation; increase of alloy additive concentration and possibility to regulate this concentration, regulation of wolfram structure, reduction of material consumption.

19 cl, 2 dwg, 1 tbl, 3 ex