METHOD OF FORMING OPTICAL WAVEGUIDE IMMERSED IN GLASS Russian patent published in 2012 - IPC C03B37/75 G02B6/00 

FIELD: physics.

SUBSTANCE: glass surface containing alkali metal ions, for example, Na, K, Li, in the region of formation of the waveguide is irradiated with electrons with energy 5-20 keV and radiation dose 0.5-10 mC/cm² with electron current density 0.5-10 mcA/cm². To increase the effective refraction index of the waveguide and increase its thickness, the glass is thermally treated at temperature 350-400°C for 1-2 hours after irradiation with electrons.

EFFECT: high accuracy and manufacturability of optical waveguides immersed in thin glass surface layers, with given shape and high effective refraction index and low optical losses, variation of the depth of the waveguide and thickness thereof.

2 cl, 1 dwg