METHOD OF FORMING METAL NANOCLUSTERS IN GLASS Russian patent published in 2010 - IPC C03C17/06 B82B3/00 

FIELD: chemistry.

SUBSTANCE: formation of metal nanoclusters in glass is used in integrated optics to make matrices of microlenses, plasma waveguides, optical switches, chemical and biosensors based on plasma nanostructures and metamaterials. The method enables to obtain composite layers with nanoclusters of silver or copper in thin glass surface layers. The glass surface which contains silver or copper ions is exposed to electrons with energy of 2-50 keV and dose of 2-20 mK/cm², and the glass is then annealed at 400-600°C for 2-10 hours.

EFFECT: provision for high accuracy and technological effectiveness of making composite layers of given geometry, variation of depth of occurrence of the composite layer, thickness and concentration of metal nanoclusters in the layer, spatial resolution of not less than 10 nm.

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