FIELD: measurement equipment.
SUBSTANCE: invention is related to measurement equipment and may be used in micromechanical gyroscopes for systems of control of movable objects of various purpose. Sensitive element comprises support frame fixed on immovable base, (movable mass) fixed on it through elastic suspensions and ring, on one side, and (movable mass) on the other side through ring. Elastic elements are identical. Movable masses equal in size are arranged as a whole with elastic elements from plate of single-crystal silicon, which is oriented in crystallographic plane 100, it is also possible to use plane 110.
EFFECT: introduction of additional annular resonator, excitation of both resonators in antiphase makes it possible to improve good quality due to reduction of energy losses and reduction of effect from disturbance factors and to improve accuracy.
1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| INTEGRATED SENSITIVE ELEMENT OF VIBRATION GYROSCOPE | 2011 |
|
RU2453812C1 |
| METHOD OF CONTROLLING FOUR-MASS RESONATOR IN MICROMECHANICAL GYROSCOPE | 2023 |
|
RU2825192C1 |
| SENSOR FOR MICRO-MECHANICAL GYROSCOPE | 2005 |
|
RU2301969C1 |
| DETECTING ELEMENT OF MICROMECHANICAL GYROSCOPE | 2009 |
|
RU2423668C1 |
| INTEGRATING MICRO-MECHANICAL VIBRATION GYROSCOPE | 2005 |
|
RU2296300C1 |
| MICROMECHANICAL ACCELEROMETER WITH LOW SENSITIVITY TO THERMOMECHANICAL INFLUENCES | 2020 |
|
RU2746762C1 |
| MICROVACUUMMETER | 2021 |
|
RU2774181C1 |
| SPACE INCREMENTAL VELOCITY GAUGE | 2012 |
|
RU2524687C2 |
| MICROMECHANICAL SENSOR OF ANGULAR SPEED | 2009 |
|
RU2410701C1 |
| COMPENSATION PENDULOUS ACCELEROMETER | 2013 |
|
RU2543708C1 |
