FIELD: physics.
SUBSTANCE: capacitive force sensor (100) has a substrate (101) on which there is at least one electrode pair (102, 103) which gives capacitance. The substrate (101) is fixed relative a first plate (106). The exciting circuit (104) is configured to apply voltage relative the earthing 105 of the circuit to the electrode pair (102, 103). The first plate (106) is separated from a second plate (107), which is connected with the earthing 105 of the circuit, by a collapsible member (108, 109). The collapsible member (108, 109) is configured to counteract the compression force (110) while enabling displacement of the first plate (106) relative the second plate (107). The capacitance detection circuit (111) is configured to detect change in capacitance when the collapsible member (108, 109) is pressed. Further, the compression force (110) is determined from change in capacitance and the spring constant of said collapsible member (108, 109).
EFFECT: simplification and higher reliability.
20 cl, 8 dwg
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Authors
Dates
2012-06-27—Published
2009-07-07—Filed