MULTIFUNCTIONAL MEASUREMENT MODULE Russian patent published in 2012 - IPC H01L29/84 G01L9/04 

FIELD: physics.

SUBSTANCE: multifunctional module for measuring physical quantities includes a detecting element for measuring pressure which is a profiled area of a semiconductor silicon substrate on which a Wheatstone bridge is formed, a detecting element for measuring acceleration having a Wheatstone bridge, a detecting element for measuring temperature which is in form of a thermistor. The detecting elements for measuring pressure, acceleration and temperature have a single monolithic design on the semiconductor silicon substrate which is mounted between two glass insulators. The detecting element for measuring acceleration is in form of an inertia mass mounted on the semiconductor silicon substrate by a flexible suspension. The Wheatstone bridges of the detecting elements for measuring pressure and acceleration are based on polycrystalline silicon on a dielectric layer on the planar side of the semiconductor silicon substrate. On the glass insulators there are depressions on the side where the inertia mass of the detecting element for measuring acceleration is located for free displacement thereof.

EFFECT: wider natural frequency and range of measuring acceleration, wider temperature range and enabling simultaneous measurement of pressure, acceleration and temperature.

3 dwg