SENSING ELEMENT OF THE MICROMECHANICAL ACCELEROMETER Russian patent published in 2022 - IPC G01P15/125 

FIELD: measuring technology.

SUBSTANCE: invention relates to the field of measuring technology, namely to measuring elements of linear acceleration. The essence of the invention lies in the fact that the sensing element of the micromechanical accelerometer additionally contains two counterweights installed with a gap relative to the substrate, fixed through additional elastic elements on additional support elements fixed on the substrate, while the response pins are fixed on two beams connected through levers with the counterweights, while the frame is fixed on the substrate, and elastic elements are fixed from the second side to the support elements.

EFFECT: increase in the accuracy of measuring linear acceleration while increasing the reliability of the sensing element of the micromechanical accelerometer in the presence of external influencing factors, in particular shocks and vibrations of high intensity.

1 cl, 1 dwg