FIELD: physics.
SUBSTANCE: fragments of the controlled surface are selected; these fragments are repeatedly scanned, while varying the type, direction and origin of the scanning motion, with a beam of optical radiation which varies its spatial orientation during each scanning cycle; coordinates of areas where the highest intensity of scattered light for each type, direction and origin of scanning motion was detected are recorded; the obtained coordinates are recalculated in a unified coordinate system; the position of small inclusions with light-reflecting faces is determined from the obtained coordinates. The device is provided with five electric motors. The housing is vertical and has a holder which can move vertically linearly and angularly in the horizontal plane.
EFFECT: improved method.
3 cl, 6 dwg
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