METHOD FOR DEPOSITION OF ELECTRIC INSULATING LAYERS Russian patent published in 2012 - IPC C23C14/35 

Abstract RU 2461664 C2

FIELD: electricity.

SUBSTANCE: between at least one anode and cathode of arc source in reactive gas atmosphere a steady electrical arc discharge is realised upon application of mostly perpendicular external magnetic field with vertical component Bz set in the range 3-50 g.wt. to the target surface and the magnetic field has radial component Br relative to the mentioned target surface, it is less as compared to component Bz. Excitation current is supplied at least to one usually axially polarised coil with geometry similar to the target periphery.

EFFECT: improving efficiency of the method.

24 cl, 6 dwg, 1 ex

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RU 2 461 664 C2

Authors

Ramm Jurgen

Vidrig Beno

Vol'Rab Kristian

Dates

2012-09-20Published

2007-07-12Filed