ARC EVAPORATOR WITH PRESET ELECTRIC FIELD Russian patent published in 2016 - IPC C23C14/32 C23C14/35 

FIELD: electricity.

SUBSTANCE: invention is related to arc evaporator intended for evaporation of material when the substrate is treated. The device comprises cathode, anode, voltage source in order to generate positive potential at anode in relation to cathode. The device also comprises magnet elements generating magnetic field over the cathode surface. Anode (303) is shaped as a ring around edge of cathode (309) in direct vicinity from it on conditions of locating major part of power lines of the magnetic field generated by magnet elements (305) outdoing from the cathode (309) surface in prevailing direction parallel to the cathode surface (309), and together with the magnetic field generated by magnetic elements (305) joint support of entry for power lines of the magnetic field outdoing from the cathode (309) surface to anode (303), if they do not outgo from the cathode (309) surface in the central area of cathode (309).

EFFECT: in result at permanent high evaporation rate application of layers with low surface roughness is ensured.

7 cl, 11 dwg