METHOD TO DEPOSIT ELECTRICALLY INSULATING LAYERS Russian patent published in 2014 - IPC H01J37/32 

Abstract RU 2510097 C2

FIELD: electricity.

SUBSTANCE: invention relates to the method for operation of an arc source, besides, the electric spark discharge is ignited and controlled on the surface of a target (5), and the spark gap is controlled simultaneously by DC, with comparable DC voltage DV, and pulse current generated by means of periodically applied voltage signal. At the same time the voltage on the arc source is increased within several microseconds, and the shape of the voltage signal is substantially freely chosen.

EFFECT: increased voltage of a spark gap.

21 cl, 5 dwg

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RU 2 510 097 C2

Authors

Ramm Jurgen

Vol'Rab Kristian

Dates

2014-03-20Published

2008-02-29Filed