FIELD: electricity.
SUBSTANCE: electroarc source comprises a target (1), a front surface (2) of a target for vacuum evaporation of target material, a rear side of the target with a cooling plate (4), a central zone (Z) of the target and the target edge. This electroarc source also comprises a magnetic accessory (8, 9), including an internal magnetic system (8) and/or an external magnetic system (9), to develop a magnetic field near the front surface of the target. At the same time at least one of the magnetic systems (8) is polarised radially and individually or in combination with an appropriate other magnetic system results in the fact that power lines of the magnetic field pass their substantially to the front surface of the target (2).
EFFECT: improved coefficient of target usage and reduced formation of splashes.
31 cl, 27 dwg
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