FIELD: electricity.
SUBSTANCE: electroarc source comprises a target (1), a front surface (2) of a target for vacuum evaporation of target material, a rear side of the target with a cooling plate (4), a central zone (Z) of the target and the target edge. This electroarc source also comprises a magnetic accessory (8, 9), including an internal magnetic system (8) and/or an external magnetic system (9), to develop a magnetic field near the front surface of the target. At the same time at least one of the magnetic systems (8) is polarised radially and individually or in combination with an appropriate other magnetic system results in the fact that power lines of the magnetic field pass their substantially to the front surface of the target (2).
EFFECT: improved coefficient of target usage and reduced formation of splashes.
31 cl, 27 dwg
Title | Year | Author | Number |
---|---|---|---|
MODIFIED CONFIGURATION OF MAGNETS FOR ELECTRIC ARC EVAPORATORS | 2009 |
|
RU2550502C2 |
MAGNETOOPTIC CONVERTER, METHOD OF MAKING MAGNETOOPTIC CONVERTER AND METHOD OF VIEWING INHOMOGENEOUS MAGNETIC FIELD | 2009 |
|
RU2399939C1 |
PLASMA-IMMERSION ION TREATMENT AND DEPOSITION OF COATINGS FROM VAPOUR PHASE WITH HELP OF LOW-PRESSURE ARC DISCHARGE | 2014 |
|
RU2695685C2 |
METHOD FOR DEPOSITION OF ELECTRIC INSULATING LAYERS | 2007 |
|
RU2461664C2 |
METHOD AND DEVICE FOR GENERATING PLASMA EXCITED BY MICROWAVE ENERGY IN ELECTRON CYCLOTRON RESONANCE (ECR) DOMAIN, IN ORDER TO CARRY OUT SURFACE TREATMENT OR PRODUCE COATING AROUND FILIFORM ELEMENT | 2015 |
|
RU2663211C2 |
DEVICE AND METHOD FOR COATING LONG PRODUCTS | 2018 |
|
RU2686399C1 |
MAGNETRON SPRAYING SYSTEM | 2021 |
|
RU2782416C1 |
POWER GENERATION PROCESS AND POWER PLANT IMPLEMENTING IT | 1997 |
|
RU2148278C1 |
METHOD OF DELIVERING A CRYOGENIC FUEL TARGET FOR CONTROLLED INERTIAL THERMONUCLEAR SYNTHESIS, A SYSTEM AND A CARRIER | 2019 |
|
RU2727925C1 |
ELECTROMAGNETIC ULTRASONIC TRANSFORMER | 2004 |
|
RU2345356C2 |
Authors
Dates
2012-04-20—Published
2007-05-10—Filed