SCANNING PROBE MICROSCOPE COMBINED WITH DEVICE FOR MEASURING MASS AND DISSIPATIVE PROPERTIES Russian patent published in 2010 - IPC G01Q90/00 G01B7/34 B82B3/00 

Abstract RU 2407021 C2

FIELD: physics.

SUBSTANCE: invention relates to devices for measuring relief, linear dimensions and physical characteristics of the surface of objects using a scanning probe microscope in scanning tunnel microscope and atomic-force microscope modes. In the disclosed device there is possibility of measuring mass of a thin-film sample and dissipative properties of the thin-film sample or liquid medium using piezocrystal microbalances, as well as the possibility of modifying the surface of an object. In the scanning probe microscope combined with a device for measuring mass and dissipative properties, having a unit for controlling the piezocrytal microbalances, a scanning device having a probe holder, a probe, a recording system, a chamber and crystal resonator inside the chamber, where the said crystal resonator has a quartz disc, top and bottom electrodes, there is an optical system, an XYZ positioner and a device for applying voltage between the probe and the top electrode.

EFFECT: broader functionalities of the device.

14 cl, 1 dwg

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RU 2 407 021 C2

Authors

Bykov Andrej Viktorovich

Shelaev Artem Viktorovich

Dates

2010-12-20Published

2008-12-04Filed