FIELD: physics; optics.
SUBSTANCE: invention relates to scanning microscopy. The method involves calibration of the scanner and/or positioning the probe based on an interference pattern obtained through additional use of a light source and dividing the stream of light into two coherent streams with pass through different optical paths. The light streams are then converged and directed to the video observation system of the microscope or an additional video observation system. When calibrating the scanner, one of the light streams undergoes reflection from the surface of the sample and/or probe, and when positioning the probe, the light stream undergoes reflection from the surface of the sample.
EFFECT: increased information content of scanning, with easier adjustment of the microscope.
7 cl, 11 dwg, 2 ex
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