FIELD: physics.
SUBSTANCE: method is realised by transferring an image from a mask-cathode using secondary electron emission electrodes onto a resist whose substrate is connected to an anode. The invention is characterised by that the process chamber is filled with a working gas and a glow discharge is formed in the cathode region using an additional electrode which is electrically connected to the anode. The mask-cathode is made from materials different secondary ion-electron emission coefficients. Parameters of the glow discharge are selected based on the condition that secondary ion-electron emission occurs from both materials of the mask-cathode.
EFFECT: longer service life of the mask-cathode.
2 cl, 4 dwg
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