METHOD OF COATING AND DEVICE FOR ITS IMPLEMENTATION Russian patent published in 2017 - IPC C23C14/38 

FIELD: electricity.

SUBSTANCE: cathode with a target is used as a source of deposited particles. When the glow discharge is ignited, the pressure in the gas discharge chamber is set below P = 10^-2 Torr, different concentrations of gas particles are created in different areas of the interelectrode space by creating a supersonic working gas flow with a velocity greater than V = 300 m/s in a given area of the interelectrode gap in the transverse to the electric field direction. The coating application device comprises a gas discharge chamber and a cathode with a target placed in it and an anode, a gas inlet for filling with working gas in the form of a supersonic nozzle that is a diffuser, a confuser, wherein the confuser and diffuser are arranged coaxially with each other in the interelectrode space in the gas discharge chamber providing the confuser and diffuser axis location in a direction transverse to the axis of the anode and the cathode at a given distance relative to the anode and cathode.

EFFECT: invention makes it possible to obtain a high coating appliance rate at low pressures, which increases the purity of the process and simplifies the design of the device.

2 cl; 3 dwg