METHOD OF MAKING ORDERED NANOSTRUCTURES Russian patent published in 2012 - IPC H01L21/20 B82B3/00 

FIELD: chemistry.

SUBSTANCE: in the method of making ordered nanostructures, involving formation of ordered regions on the surface of a base or in its surface layer, depositing a continuous layer whose material wets the ordered regions but not the base, carrying out heat treatment, which depends on the thickness and melting point of the material of the continuous layer until formation of an array of ordered nanoclusters, after which the base is etched, wherein the array of ordered nanoclusters is a mask, or a carbon nanostructure is formed on the array of ordered nanoclusters, wherein said nanoclusters are a catalyst.

EFFECT: technique for producing an ordered structure with high aspect ratio of elements, which improves emission properties of the structure, enables use thereof as a die for nanoimprint lithography, improves adhesion of the ordered grown carbon nanotubes, from which there is emission of electrons to an underlying layer and, as a result, increases time stability of the entire device.

5 cl, 1 dwg