METHOD OF MANUFACTURING OF A FIELD EMISSION ELEMENT Russian patent published in 2019 - IPC H01J9/02 H01J1/304 B82B3/00 

FIELD: electrical engineering.

SUBSTANCE: invention relates to electronic engineering, in particular to field emission elements containing carbon nanotubes used as cathodes, and also to a method for manufacturing them. Method of manufacturing a field emission element includes formation of a dielectric layer on an electrically conductive substrate, formation of a mask for etching a dielectric layer and an electrically conductive substrate, formation of a matrix of holes in dielectric layer and depressions in the substrate, formation of a catalyst layer for growing carbon nanotubes, removal of a mask, formation of a mask for etching catalyst layer, liquid chemical etching of catalyst layer with the formation of catalyst areas inside the depressions in electrically conductive substrate for the subsequent growth of carbon nanotubes, removal of the mask, plasma-chemical deposition of the second dielectric layer, magnetron etching of the drawing layer, forming a mask for etching the structure consisting of a pulling and dielectric layers, over previously formed catalyst areas inside the depressions in the substrate for the subsequent growth of carbon nanotubes, plasma-chemical anisotropic etching with the formation of holes in the drawing and dielectric layers to form a through hole, removal of the mask, isotropic gas-phase etching of the second dielectric layer before opening the catalyst, vapor-phase synthesis of carbon nanotubes on the catalyst.

EFFECT: preventing a short between carbo nanotube and the drawing electrode, reducing leakage of currents, increasing the current emission, increasing the heat sink with carbon nanotubes, improving the manufacturability, reliability and increased yield.

1 cl, 4 dwg