FIELD: physics.
SUBSTANCE: gas sensor for detecting nitrogen and carbon oxides has a substrate made from polycrystalline Al2O3, tin dioxide in gas-sensitive material, measuring elements which are in form of platinum electrodes lying on the front side of the substrate, means of heating and picking up the signal from the measuring elements. A gas-sensitive layer is deposited between the measuring elements. The means of heating are in form of a platinum thin-film or thick-film heater and are placed on the side of the substrate opposite the electrodes. Composition of the sensitive layer of nanocrystalline tin dioxide includes gold and nickel oxide nanoparticles.
EFFECT: high sensitivity of the gas sensor.
2 cl, 3 ex
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