METHOD OF PRODUCING A GAS SENSOR WITH A NANOSTRUCTURE WITH A SUPER-DEVELOPED SURFACE AND A GAS SENSOR BASED THEREON Russian patent published in 2019 - IPC G01N27/12 B82B1/00 

FIELD: manufacturing technology.

SUBSTANCE: invention can be used for production of gas sensors. Essence of the invention consists in the fact that the method of manufacturing a gas sensor with a nanostructure with a super-developed surface consists in the fact that form a heterostructure from different materials, in which a gas-sensitive layer is formed, after which it is fixed in the sensor housing, and contact pads are connected to housing leads by means of contact conductors, gas-sensitive layer is formed in the form of nanostructure with super-developed surface by two-stage chemical synthesis, at the first stage of which a homogeneous zinc oxide thin film is formed, which is a nucleating layer, and at the second stage by method of hydrothermal synthesis zinc oxide nanorods forming super-developed surface are formed.

EFFECT: possibility of increasing sensitivity to reducing gases at close to room temperature.

2 cl, 3 dwg