FIELD: physics.
SUBSTANCE: in the method of making the detecting element of a liquid and gas pressure sensor, involving depositing a fixed electrode onto a glass substrate, making a movable electrode and connection thereof, depositing an alignment mark onto the glass substrate and the movable electrode, which is in form of a silicon orientation plate (100) on which features with different depths are formed by two-step anisotropic etching of silicon through a silicon nitride mask simultaneously on both sides of the plate. Elements are connected by anodic splicing. Anisotropic etching can be carried out with aqueous KOH solution with concentration of 33% at temperature 92±2°C.
EFFECT: longer service life.
2 cl
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