DEVICE, HAVING LAYERED STRUCTURE, FOR DETECTING THERMAL RADIATION, METHOD FOR PRODUCTION AND USE THEREOF Russian patent published in 2012 - IPC H01L27/16 G01J5/10 

FIELD: physics.

SUBSTANCE: device (1) for detecting thermal radiation in form of a stack (10) consisting of: at least one sensor substrate (11), having a sensor (111) for converting thermal radiation to an electric signal; at least one circuit substrate (12) with at least one reading circuit (121, 122) for reading the electric signal; at least one cover (13) which covers the sensor; in which for each of said elements: the cover (13), sensor substrate (12) and substrate (11), the corresponding plate is used; wherein the sensor substrate is placed between the circuit substrate and the cover; wherein said stack (10) is a layered structure; the sensor substrate and the cover lie relative each other such that between the sensor on the substrate and the cover there is at least a first cavity (14) which is bounded by the sensor substrate and the cover; the circuit substrate and the sensor substrate lie relative each other such that between them there is at least a second cavity (15) bounded by these substrates; the first and/or second cavities are evacuated or can be evacuated. A method of making said device is also disclosed. The disclosed device can be used in motion sensors, proximity sensors and thermal imagers.

EFFECT: possibility of making a compact device for detecting thermal radiation, which has a smaller size compared to existing devices.

15 cl, 3 dwg