DEVICE HAVING MEMBRANE STRUCTURE FOR DETECTING THERMAL RADIATION, METHOD FOR PRODUCTION AND USE THEREOF Russian patent published in 2012 - IPC G01J5/10 

FIELD: physics.

SUBSTANCE: device has at least one membrane on which at least one thermal detector is mounted for the conversion of thermal radiation into an electric signal and at least one circuit support for carrying the membrane and at least one readout circuit for reading out the electric signal. The detector is electrically connected through the membrane to the readout circuit by a through-contact. The invention also relates to a method of making said device, comprising the following steps: taking a membrane with a detector and at least one electrical through-contact, as well as a circuit support and bringing together the membrane and the circuit support such that the through-contact passing through the membrane closes the electric circuit between the detector and the readout circuit. The device is preferably made in form of circuits on common wafers. Such functional silicon wafers are stacked, reliably connected and the separate ready devices are separated. The detectors used are preferably pyroelectric sensors. The disclosed device is used as a pressure sensor, a proximity sensor and a thermal imager.

EFFECT: high accuracy and information content of thermal measurements.

15 cl, 2 dwg