METHOD OF PRODUCING THIN FILMS OF CHEMICAL COMPOUNDS Russian patent published in 2012 - IPC C23C18/02 

FIELD: chemistry.

SUBSTANCE: method involves transfer of the initial unsaturated coordination compound into a solution by binding the neutral ligand to the central metal atom to form a soluble different-ligand coordination compound and depositing a thin film of the obtained compound from the solution onto a substrate. The neutral ligand used is a donor ligand which is capable of reversible reaction with the initial compound to form a soluble different-ligand coordination compound and be completely removed from it at temperature lower than the thermolysis temperature of the initial compound. The obtained thin film is additionally subjected to thermal treatment at temperature lower than the thermolysis temperature of the initial chemical compound but higher than the ligand removal temperature.

EFFECT: invention enables to obtain thin films of non-volatile and insoluble chemical compounds.

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