METHOD OF EVALUATING KINETICS OF FORMATION OF NANOSIZED FILMS AND MEASURING OPTICAL CHARACTERISTICS THEREOF Russian patent published in 2013 - IPC G01N21/27 B82Y35/00 

Abstract RU 2473886 C1

FIELD: physics.

SUBSTANCE: method involves thermal-vacuum action at a given temperature on samples of material placed in special heat-insulated containers, and trapping easily condensed substances released from the samples on condensing plates. Mass loss is determined from the difference between the mass of the sample before and after exposure. Content of volatile condensed substances is determined likewise. The test sample is heated to temperature which is 0.1% lower than the minimum temperature threshold where decomposition of non-metallic material begins, wherein the glass sample is continuously irradiated with monochromatic flux and energy and frequency characteristics of the monochromatic flux are recorded. Kinetics are determined from change in the transmission coefficient.

EFFECT: invention increases the number of inspected parameters of condensable films.

1 dwg

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RU 2 473 886 C1

Authors

Bashkov Valerij Mikhajlovich

Gorodnichev Viktor Aleksandrovich

Kalashnikov Evgenij Valentinovich

Mikhalev Pavel Andreevich

Fedotov Jurij Viktorovich

Dates

2013-01-27Published

2011-09-01Filed