MODIFICATION METHOD OF MATERIAL SURFACE BY PLASMA TREATMENT Russian patent published in 2013 - IPC C23C14/22 C22F1/02 

FIELD: machine building.

SUBSTANCE: method involves loading of material to a chamber, vacuum pumping of the chamber, plasma treatment of material surface and its unloading. Plasma treatment is performed with cathode spots of vacuum arc discharge created in the chamber so that remelting of the material surface layer is provided. Pressure in the chamber is maintained at the level of not more than 1 Pa, voltage of vacuum arc discharge - not less than 10 V, and current of vacuum arc discharge - not less than 1 A. Excitation and maintenance of vacuum arc discharge is performed at application between cathode and anode of constant or impulse-periodic voltage, and localisation of cathode spots on the surface and control of their movement is performed with magnetic field.

EFFECT: improving efficiency and quality of modification of surface of materials and produced items.

6 cl, 2 dwg