FIELD: measurement equipment.
SUBSTANCE: manufacturing method of a sensitive element of pressure transducer on NDC-structure (nonlinear distortion coefficient) consists in formation in working layer of NDC-plate of resistive strain gauges, formation of insulating layer on resistive strain gauges, and formation of diaphragm. Blind holes reaching resistive strain gauges are formed in the diaphragm and insulating layer. Then, protective layer and metallisation are formed. Diaphragm of sensitive element of pressure transducer on NDC-structure is formed by means of a deposition method.
EFFECT: reduction of thickness and planar dimensions of diaphragm and improvement of manufacturability.
7 dwg
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