CAPACITANCE PRESSURE SENSOR Russian patent published in 2013 - IPC G01L9/12 

FIELD: measurement equipment.

SUBSTANCE: capacitance pressure sensor comprises a double-sided foiled dielectric film, being a base of the sensor. On the upper surface of the sensor base there are capacitor armatures with outputs. The foil on the lower surface of the base is the sensor screen. The sensor membrane is rigidly fixed on the surface of the second dielectric film. The third and fourth dielectric films are applied onto both surfaces of the membrane. Additionally the fifth dielectric film is introduced into the sensor. To protect outputs, a screen is installed, being coated with the sixth and seventh dielectric films. Additionally an output is introduced in the form of a wire with a diameter of 1-2 mcm coated with insulation. The screen is made from the same material as the membrane. The second film is made as perforated with a gaseous dielectric inside the cell and is impregnated with glue. On the sensor base the armatures are perforated and have at least five holes for connection of the sensor cavity under the membrane with atmospheric pressure.

EFFECT: reduced hysteresis of a sensor and higher sensitivity and accuracy of static pressure measurement.

1 dwg