FIELD: measurement technology, measurement of pressure in mechanical, power engineering, aviation equipment, scientific research, gas industry. SUBSTANCE: there is proposed design of capacitive sensitive element which is assembled in vacuum with use of technology of manufacture of thin epitaxial films in vacuum. Flat membrane of transducer is cylindrical in shape with perforation cells having various corrugations ( sinusoidal, toroidal, serrate, etc ). There are given rational dimensions of structure of sensitive element of capacitive transducer making it possible to measure pulsation of pressure from 102 Pa to 2•105 Pa ( 15 -200 dB ), static pressure from ) to 5•105 Pa and their combination, that is, static-dynamic pressure within these intervals. EFFECT: widened application field, raised reliability, reduced dimensions. 2 dwg
Authors
Dates
2002-02-10—Published
2000-07-27—Filed