MAGNETIC FLUX DENSITY SENSOR Russian patent published in 2013 - IPC H01L43/06 

FIELD: physics.

SUBSTANCE: magnetic flux density sensor includes an insulating substrate in form of a rectangular plate, a silicon epitaxial layer on the surface of the insulating substrate, first and second planar current electrodes and first and second planar potential (Hall) electrodes; the current and potential electrodes are placed in pairs on opposite sides of the epitaxial layer. According to the invention, the sensor includes a feedback loop in form of a rectangular coil deposited on an insulating layer and encircling the current and potential electrodes; the current and potential electrodes have a Schottky barrier; there is a differential operational amplifier, the inputs of which are connected to the first and second potential electrodes, and the output of the operational amplifier is connected to one of the ends of the feedback loop, such that the feedback is negative; the second end of the feedback loop is connected through a load resistor to the earth.

EFFECT: high stability of operation and low noise level of the device.

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