FIELD: chemistry.
SUBSTANCE: invention relates to production of ceramic materials and is meant for making targets that are a source of material for magnetron, electron-beam, ion-beam and other methods of depositing films in micro- and nano-optoelectronics. According to the present method of making a composite target, a mixture containing zinc oxide powder and zinc metal powder is heated at temperature ranging from 100°C to 150°C, pressed and fired. The obtained mixture is preferably pressed at temperature ranging from 100°C to 150°C and temperature of the mixture is preferably provided by microwave heating. Firing is carried out at temperature from 400 to 1450°C.
EFFECT: obtaining a zinc oxide-based target with uniform distribution of zinc metal.
4 cl, 3 ex, 3 dwg
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