RESONANT SCANNER-BASED LASER SCANNING SYSTEM Russian patent published in 2013 - IPC G02B26/10 

FIELD: physics.

SUBSTANCE: system includes series-arranged radiation source, resonant scanner with a mirror, capable of deflecting laser radiation from the radiation source with high speed to a plane perpendicular to the optical axis of the laser scanning system, and a focusing lens. The lens lies at a distance from the mirror of the resonant scanner which is equal to its focal length. Behind the lens, at a distance from its focal plane equal to 0-5% of the focal distance, there is scanning range limiter which transmits central rays and blocks peripheral rays of the laser deviated by the mirror of the resonant scanner in a transverse direction by not more than 95% of the maximum scanning angle.

EFFECT: uniform distribution of energy on the processed surface.

4 cl, 4 dwg