SCANNING PROBE MICROSCOPE WITH AUTOMATIC CANTILEVER TRACKING SYSTEM Russian patent published in 2004 - IPC

FIELD: cantilever tracking systems using scanning probe microscopes. SUBSTANCE: scanning probe microscope has base-coupled scanner that mounts cantilever for engagement with specimen, first mirror coupled with scanner, and laser optically coupled with first mirror, cantilever, and photodetector. Cantilever motion path is disposed on sphere. First mirror is overhanging from scanner for turning together with cantilever about center of sphere so that reflecting surface of first mirror faces cantilever and functions as central perpendicular to section interconnecting current position of cantilever and center of sphere, and continuation of laser optical axis beyond first mirror crosses center of sphere. EFFECT: enlarged functional capabilities; enhanced tracking precision and reliability, facilitated adjustment of device. 22 cl, 7 dwg