METHOD OF MAKING MULTILAYER METAL ELEMENTS USING ULTRAVIOLET RADIATION-UTILISING PROCESSES Russian patent published in 2013 - IPC G03F7/00 

FIELD: physics.

SUBSTANCE: according to the method, the conducting surface of a substrate is coated with a first layer of photosensitive resin and treated with radiation through a mask which is matched with the required shaped cut. By developing the first layer, a first level of a mould made from resin with openings which open the conducting surface of the substrate is obtained. Further, a new layer of photosensitive resin is deposited on top of the developed layer. The new layer is also treated with radiation through a mask which is matched with the required shaped cut. By developing the new layer, a multi-level mould made from resin with openings which open the conducting surface of the substrate is obtained. Electrodeposition of metal or alloy is carried out in the openings of the multi-level mould. The substrate is separated and resin layers are removed to open the multilayer metal structure formed by said metal or alloy, obtained via deposition in the openings.

EFFECT: optimum control of temperature and duration of heat treatment.

9 cl, 13 dwg