METHOD FOR MEASURING PRESSURE, CALIBRATION, AND PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM Russian patent published in 2013 - IPC G01L9/04 B82B3/00 

FIELD: measurement equipment.

SUBSTANCE: in pressure measuring method using a resistive strain-gauge pressure sensor based on a nano- and microelectromechanical system (NiMEMS), in the measurement mode, the measured pressure value P_i is calculated by means of biharmonic spline interpolation as per control points, based on column vector W(P_e, U_iZ, U_pt, X₁…X_n) saved at calibration stage by the following formula: P_i=G^T×W, where G^T - transposed column vector G; symbol "×" means matrix product. Calibration for pressure measurement is performed by recording of stresses of measurement U_iz and feed U_pt diagonals of a bridge measurement chain and values X₁…X_n, depending on destabilising factors, and by writing to a read-only memory of the sensor of column vector W, which is calculated as per the following formula: W=g^-1×P, where P - column vector of reference values of pressure at control points; g - matrix, the elements of which are defined depending on the number of variables of conversion function. Pressure sensor based on NiMEMS, which implements the proposed measurement and calibration methods, includes a current sensor, a resistive strain-gauge pressure converter, ADC, a calculating device, a read-only memory and a digital interface. With that, the calculation device consists of a conversion unit of ADC code to a numerical voltage value, and a calculation unit of numerical pressure value.

EFFECT: improvement of pressure measurement accuracy.

3 cl, 4 dwg, 4 tbl