PRESSURE MEASUREMENT METHOD, CALIBRATION METHOD AND PRESSURE SENSOR BASED ON NANO- AND MICROELECTROMECHANICAL SYSTEM Russian patent published in 2013 - IPC G01L9/04 B82B1/00 B82B3/00 

FIELD: measurement equipment.

SUBSTANCE: in pressure measurement method using a pressure strain gauge based on nano- and microelectromechanical system (NaMEMS), in the measurement mode, value of measured pressure P_i is calculated by means of biharmonic spline interpolation at check points based on column-vector W(P₀, U_iz, U_pl) saved at calibration stage by the following formula: P_i=G^T×W, where G^T - transposed column-vector G; "x" means matrix product. Calibration for pressure measurement is performed as per the method consisting in recording of stresses of measuring U_iz and feeding U_pl diagonals of bridge measuring circuit and recording to a read-only memory of sensor column-vector W, which is calculated by the following formula: W=g^-1×P, where P - column-vector of reference pressure values at check points; g - matrix, the diagonal elements of which are equal to zero, and the rest components are calculated in a certain way. Pressure sensor based on NaMEMS, implementing the proposed measurement and calibration methods, involves a calculation device that includes a conversion unit of ADC code to numerical value of stress, a calculation unit of numerical pressure value; at that, in the calculation unit of numerical value of pressure, the measured pressure P_i is determined by the formula P_i=G^T×W.

EFFECT: improving measurement accuracy of pressure and processibility.

3 cl, 3 dwg