FIELD: instrumentation.
SUBSTANCE: proposed method consists in finishing the membrane surface, making dielectric film and strain elements with low-value jumpers and contact sites there between using the strain-sensitive layer template. It comprises connection of output terminals to said contact sites in areas remote from strips of said sites. After said connection, said NMEMS membrane is subjected to cyclic action of test pressures Pj distributed uniformly from lower limit P0 to upper limit PH and from upper limit PH to lower limit P0 of transducer measurement range at simultaneous measurement of its output signal and supply voltage at every calibration point to calculate criterion of temporary stability by the following equation: 
EFFECT: higher temporary stability, longer life.
2 dwg
