METHOD TO MEASURE PRESSURE AND INTELLIGENT PRESSURE SENSOR ON ITS BASIS Russian patent published in 2014 - IPC G01L9/04 

FIELD: measurement equipment.

SUBSTANCE: proposed invention relates to measurement equipment and may be used to measure pressure of liquid and gaseous media. The proposed group of inventions includes the method of pressure measurement using a resistance strain pressure gauage on the basis of a nano- and microelectromechanical systems (NiMEMS) and an intelligent pressure sensor based on NiMEMS. At the same time in the method of pressure measurement, in the mode of calibration and measurement they simultaneously record data of voltages between units of a supply diagonal U_pt, between one unit of the supply diagonal and each unit of a measurement diagonal (U_iz1, U_iz2). In the mode of calibration they save data for calculation of voltages U_iz1, U_iz2, and in the measurement mode they calculate the measured value of pressure P based on the voltages of the supply diagonal U_pt and the measurement diagonal U_iz=U_iz1-U_iz2 and saved at the stage of data calibration. Then voltages are calculated between the unit of the supply diagonal and each unit of the measurement diagonal, based on the value of measured pressure P, voltage of the supply diagonal U_pt and saved at the stage of data calibration, they determine the difference between the calculated and measured values of voltages U_iz1, U_iz2. If this difference exceeds the value of the stability criterion, then the decision is made on unreliability of pressure measurement result. The intelligent pressure sensor based on NiMEMS, which implements the proposed method of pressure measurement, comprises a bridge measurement circuit from strain gauges, a current source, three analogue-digital converters, a computing device, a permanent memory and a digital interface, besides, the computing device of the self-control unit, the second, third and fourth inlets of which are connected to the first, second and third outputs of the unit of ADC code conversion into the numerical value of voltage, and the fifth inlet is connected to the fourth inlet of the computing device. The objective of the proposed invention is to increase reliability of the measurement result by introduction of self-control of the sensor and realisation of inspection of validity of pressure measurement due to comparison of measured and computed values of voltages between one unit of the supply diagonal and each of the units of the measurement diagonal.

EFFECT: increased reliability of the measurement result by introduction of self-control of the sensor and realisation of inspection of validity of pressure measurement due to comparison of measured and computed values of voltages between one unit of the supply diagonal and each of the units of the measurement diagonal.

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