METHOD OF NANOSCOPY Russian patent published in 2013 - IPC G01N21/00 B82B1/00 

FIELD: nanotechnology.

SUBSTANCE: on the object under study the scan area is selected within which the area with the standard uniform optical properties is formed, the points of the selected scan area are repeatedly scanned with the laser beam, moving each time the start of the scanning for the distance not greater than the required resolution capability, with simultaneous recording and preserving information about the optical characteristics of the enlarged image of the points of the scan area and the coordinates of points of the scan area. The image of the object under study is restored based on the use of the information on the optical characteristics of the points of the area with the standard uniform optical properties and the information on the optical properties of the other points of the scan area. Movement of the start of the scanning is carried out at a distance of from 0.5 nm to 1000 nm.

EFFECT: increased resolution capability, the ability of the study of the objects with a resolution of 1 nm and more.

2 cl, 6 dwg