SEMICONDUCTOR DEVICE AND METHOD OF ITS MANUFACTURING Russian patent published in 2013 - IPC H01L21/336 H01L29/786 

Abstract RU 2503085 C1

FIELD: electricity.

SUBSTANCE: semiconductor device comprises a thin-film transistor comprising a gate bus, the first insulating film, an oxide-semiconductor layer in the form of an island, the second insulating film, a source bus, a drain electrode and a passivating film, and also a contact site, comprising the first connection element, made of the same conducting film as the gate bus, the second connecting element made from the same conducting film as the source bus and the drain electrode, and the third connection element formed on the second connection element. The second connection element contacts with the first connection element in the first window provided in the first and second insulating films, the third connection element contacts with the second connection element in the second window provided in the passivating film, and the second connection element covers the end surfaces of the first insulating film and the second insulating film in the first window, but does not cover the end surface of the passivating film in the second window. As a result the conical shape of the contact hole of the contact site may be controlled with high accuracy.

EFFECT: reduced damage of a mask.

17 cl, 14 dwg

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RU 2 503 085 C1

Authors

Midzuno Juudzi

Tikama Esimasa

Nisiki Khirokhiko

Okhta Esifumi

Khara Takesi

Aita Tetsuja

Suzuki Masakhiko

Takei Mitiko

Nakagava Okifumi

Kharumoto Esijuki

Dates

2013-12-27Published

2010-12-03Filed