FIELD: chemistry.
SUBSTANCE: invention can be used to produce trichlorosilane and/or silicon tetrachloride for electronic industry. The apparatus has a fractionating column 1, where diphenylthiocarbazone and/or triphenylchloromethane added to industrial trichlorosilane and/or industrial silicon tetrachloride form macro-molecular complexes with admixtures. The admixtures are selected from a group comprising boron, boron trichloride, metals and their combinations. As a result of fractionation, a first stillage residue is obtained, as well as a first overhead product which undergoes fractionation in column 2 to form a second stillage residue and a second overhead product which is trichlorosilane for the electronic industry and/or silicon tetrachloride for the electronic industry. The apparatus can also have a fractionating column 3 for separating dichlorosilane and trichlorosilane present in the second stillage residue.
EFFECT: invention enables efficient removal of admixtures from industrial trichlorosilane and/or industrial silicon tetrachloride.
18 cl, 1 dwg, 2 tbl, 1 ex
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Authors
Dates
2010-07-10—Published
2005-11-14—Filed