FIELD: measurement equipment.
SUBSTANCE: membrane hot-wire anemometer comprises a heater and a thermal sensor, a gas filled tight cavity of crystal. The gas in the cavity has a range of thermal conductivity values of not higher than one tenth of membrane material thermal conductivity. The heater and the thermal sensor are arranged inside this cavity. The hot-wire anemometer may be used as a pressure sensor.
EFFECT: reduced parasitic heat transfer and increased sensitivity of a hot-wire anemometer.
2 cl, 1 dwg
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